Asymptotic solution for nonlinear chemical vapor deposition problems
Authors:
B. Cassis, O. Tikhomirov and B. A. Wagner
Journal:
Quart. Appl. Math. 51 (1993), 585-597
MSC:
Primary 80A30; Secondary 76R99, 80A32
DOI:
https://doi.org/10.1090/qam/1233532
MathSciNet review:
MR1233532
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Abstract: The problem of chemical vapor deposition involving reaction kinetics of any order $n$ at a heated substrate is considered. The deposition process is then described by a convective diffusion equation, coupled to nonlinear boundary conditions, describing the chemical reaction taking place at the heated substrate, where the nonlinearity is given in terms of the order $n$ of the reaction kinetics. We derive boundary layer equations and use a combination of perturbation and similarity methods to find the deposition rate along the susceptor.
V. G. Levich, Physicochemical Hydrodynamics, Prentice Hall, 1968
M. A. Leveque, Ann. Mind., vol. 13, 1928
N. Malmuth, Chemical vapor deposition, Presentation at the Annual R.P.I. Workshop for Industrial and Applied Mathematics, 1987
B. A. Wagner, Asymptotic solutions for a nonlinear 2-D chemical vapor deposition problem, Presentation at the Annual R.P.I. Workshop for Industrial and Applied Mathematics, 1987 and at the annual SIAM meeting, 1987
J. W. Wilder, Similarity and numerical solutions for chemical vapor deposition problems, Physicochemical Hydrodynamics, vol. 11, Prentice Hall, pp. 571–584
V. G. Levich, Physicochemical Hydrodynamics, Prentice Hall, 1968
M. A. Leveque, Ann. Mind., vol. 13, 1928
N. Malmuth, Chemical vapor deposition, Presentation at the Annual R.P.I. Workshop for Industrial and Applied Mathematics, 1987
B. A. Wagner, Asymptotic solutions for a nonlinear 2-D chemical vapor deposition problem, Presentation at the Annual R.P.I. Workshop for Industrial and Applied Mathematics, 1987 and at the annual SIAM meeting, 1987
J. W. Wilder, Similarity and numerical solutions for chemical vapor deposition problems, Physicochemical Hydrodynamics, vol. 11, Prentice Hall, pp. 571–584
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Article copyright:
© Copyright 1993
American Mathematical Society