Identification of semiconductor contact resistivity
Authors:
Stavros Busenberg and Weifu Fang
Journal:
Quart. Appl. Math. 49 (1991), 639-649
MSC:
Primary 35Q60; Secondary 35R30, 78A55
DOI:
https://doi.org/10.1090/qam/1134746
MathSciNet review:
MR1134746
Full-text PDF Free Access
References |
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Additional Information
- Weifu Fang and Ellis Cumberbatch, Inverse problems for metal oxide semiconductor field-effect transistor contact resistivity, SIAM J. Appl. Math. 52 (1992), no. 3, 699–709. MR 1163801, DOI https://doi.org/10.1137/0152039
- Olga A. Ladyzhenskaya and Nina N. Ural’tseva, Linear and quasilinear elliptic equations, Academic Press, New York-London, 1968. Translated from the Russian by Scripta Technica, Inc; Translation editor: Leon Ehrenpreis. MR 0244627
- J.-L. Lions and E. Magenes, Non-homogeneous boundary value problems and applications. Vol. I, Springer-Verlag, New York-Heidelberg, 1972. Translated from the French by P. Kenneth; Die Grundlehren der mathematischen Wissenschaften, Band 181. MR 0350177
W. H. Loh, Modelling and measurement of contact resistance, Stanford Electronic Labs., Tech. Rep., No. G830-1, Dec. 1987
W. H. Loh, K. Saraswat, and R. W. Dutton, Analysis and scaling of Kelvin resistors for extraction of specific contact resistivity, IEEE Electrion Device Letters 6 (3), 105–108 (1985)
- Murray H. Protter and Hans F. Weinberger, Maximum principles in differential equations, Springer-Verlag, New York, 1984. Corrected reprint of the 1967 original. MR 762825
- John R. Rice and Ronald F. Boisvert, Solving elliptic problems using ELLPACK, Springer Series in Computational Mathematics, vol. 2, Springer-Verlag, Berlin, 1985. With appendices by W. R. Dyksen, E. N. Houstis, Rice, J. F. Brophy, C. J. Ribbens and W. A. Ward. MR 772025
- G. F. Roach, Green’s functions, 2nd ed., Cambridge University Press, Cambridge-New York, 1982. MR 660842
- J. Wloka, Partial differential equations, Cambridge University Press, Cambridge, 1987. Translated from the German by C. B. Thomas and M. J. Thomas. MR 895589
W. Fang and E. Cumberbatch, Inverse problems for MOSFET contact resistivity, SIAM J. Appl. Math., to appear
O. A. Ladyzhenskaya and N. N. Ural’tzeva, Linear and Quasilinear Elliptic Equations, Academic Press, London, 1968
J. L. Lions and E. Magenes, Non-Homogeneous Boundary Value Problems and Applications. I, Springer-Verlag, Berlin-Heidelberg, 1970
W. H. Loh, Modelling and measurement of contact resistance, Stanford Electronic Labs., Tech. Rep., No. G830-1, Dec. 1987
W. H. Loh, K. Saraswat, and R. W. Dutton, Analysis and scaling of Kelvin resistors for extraction of specific contact resistivity, IEEE Electrion Device Letters 6 (3), 105–108 (1985)
M. H. Protter and H. F. Weinberger, Maximum Principles in Differential Equations, Springer-Verlag, New York, 1984
J. Rice and R. F. Boisvert, Solving Elliptic Problems Using ELLPACK, Springer-Verlag, New York, 1985
G. F. Roach, Green’s Functions, 2nd ed., Cambridge Univ. Press, Cambridge, 1982
J. Wloka, Partial Differential Equations, Cambridge Univ. Press, Cambridge, 1987
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Article copyright:
© Copyright 1991
American Mathematical Society
